• Thermo-dryer with Air Temperature Adjustment Function IDH□
  • Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
  • Regulator/Back Pressure Regulator for General Applications AK/BP
  • Diaphragm Valve for Ultra High Purity AP
  • Diaphragm Valve for Ultra High Purity AZ
  • Check Valve/Vacuum Generator/Flow Switch AP
  • Regulator for General Applications AK1000T
  • Aluminum High Vacuum Angle Valve XLA/C/F/G
  • Vacuum Angle Valve with Release Valve XLJ
  • For 300 mm wafer Parallel Seal Type Slit Valve XGTP
  • Slit Valve XGT
  • Rodless Cylinder for Vacuum CYV