For 300 mm wafer Parallel Seal Type Slit Valve XGTP
Description
・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
(compared with the current product)
・Easier maintenance
Easy replacement of bellows
Gate can be replaced from above.(Made to order)
・Safety measures
A mechanical end lock mechanism has been adopted.
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