For 300 mm wafer Parallel Seal Type Slit Valve XGTP

Description

・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
 (compared with the current product)
・Easier maintenance
 Easy replacement of bellows
 Gate can be replaced from above.(Made to order)
・Safety measures
 A mechanical end lock mechanism has been adopted.

More Products Information Detail, Pls Click
https://www.smcworld.com/products/en/directional/

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